Level of innovation
The proven, modular Jonas & Redmann tray automation system was adapted for the demanding production of highly efficient heterojunction (HJT) solar cells. Outstanding innovation is the particularly surface-friendly, yet high-performance handling of wafers in inline flat-carrier transport. This involves high-precision, row-by-row positioning of the wafers which are individually measured. Any deviations from the target dimensions are automatically compensated for. During the measurement and compensation process, the measurement system takes temperature-dependent length extension of the trays in to account as well.
Standardized interfaces to exchange process data from the automation, which is thoroughly based on industrial PCs, with overlaid manufacturing execution systems (MES) have also been implemented. This fulfills requirements for consistent workflow tracking and optimization, in keeping with the concept of Industry 4.0, without requiring additional effort.
Solution efficiency
The solution boasts high-precision handling of thin wafers (120-160 µm) at elevated temperatures of over 200°C and in a controlled atmosphere (nitrogen). This is made possible by an innovative gripper and transport system and by integrated, comprehensive measurement systems.
Best-in-class camera system technology ensures precise wafer alignment and optimum wafer position into tray pockets. The HJT TRAY AUTOMATION System thus guarantees perfect conditions for efficient processing. The platform provides camera-based breakage control and discharge of defective wafers and allows an easy integration of customized measurement needs (thickness, color). Comprehensive sensors record temperature, nitrogen concentration, and humidity within and partly outside the working space.
Solution sustainability
The solution incorporates gentle wafer handling during gripping and placement onto tray pockets, as well as transport onto special conveyor belts – these features minimize surface damage. This in turn contributes toward a lasting high level of efficiency for the processed heterojunction cells up to 24% cell efficiency. The modular system concept can be customized to suit any process technology. Proven modules and functions ensure short development times, lastingly reliable operation, a long service life, and, as a result, maximum investment security.
Commercial success
The Jonas & Redmann TRAY AUTOMATION systems have already been installed to deliver throughputs of up to 6,500 wafers per hour. As part of a current project, it ensures safe supply under all circumstances when PECVD process equipment is deployed at a rate of at least 2,600 wafers per hour. Row-by-row pick-up and placement of incoming and outgoing wafers (unprocessed, partially processed, and fully processed) helps shorten cycle times.
Contact:
Mrs. Elke Beune
Head of Corporate Communications
E-Mail: e.beune@jonas-redmann.com
