BTU International will debut its next-generation thermal processing equipment in Booth E27-10 at the upcoming 4th International Power Generation Expo, being held March 2-4, 2011 at the Tokyo Big Sight in Japan.
BTUs new TRITAN dual-lane metallization firing system will be introduced to the Japanese market. This state-of-the-art system features increased throughput at 3,600 wafers per hour, an edge support transport system, and a temperature spike faster than three seconds.
The 90 MW metallization firing system also features BTUs unique TriSpeed technology, allowing users to take advantage of superior ramp rates ? up to 200ºC per second ? while not compromising the drying and cooling sections of the profile.
The three-belt, three-speed system provides revolutionary control of profile development. BTU also will feature its Meridian in-line diffusion system. This system is the industrys most successful, market leading in-line diffusion system with well over two GW in customer commitments.
For more information, visit company representatives in Booth E27-10 or click www.btu.com
