BTUs new TRITAN dual-lane metallization firing system will be highlighted at the exhibition. This state-of-the-art system features increased throughput at 3,600 wafers per hour, an edge support transport system, and spike time of three seconds or less.
The 90 MW metallization firing system also features BTUs unique TriSpeed technology. TriSpeed allows users to take advantage of superior ramp rates – up to 200ºC per second – while not compromising the drying and cooling sections of the profile. The three-belt, three-speed system provides revolutionary control of profile development.
BTU also will feature its Meridian in-line diffusion system. This system is the industrys most successful, market leading in-line diffusion system with well over two GW in customer commitments.
For more information, visit company representatives in Booths A562 and B354 or go to www.btu.com