BTUs new TRITAN dual-lane metallization firing system will be introduced to the Korean market. This state-of-the-art system features increased throughput at 3600 wafers per hour, an edge support transport system, and a temperature spike faster than three seconds.
The 90 MW metallization firing system also features BTUs unique TriSpeed technology. TriSpeed allows users to take advantage of superior ramp rates ? up to 200ºC per second ? while not compromising the drying and cooling sections of the profile. The three-belt, three-speed system provides revolutionary control of profile development.
BTU also will feature its Meridian in-line diffusion system. This system is the industrys most successful, market leading in-line diffusion system with well over two GW in customer commitments.
For more information, visit company representatives in Booth I-33 or go to www.btu.com
