For manufacturing polycrystalline silicon, the pyrometer series Modline 5 and Marathon MR and FR is available for measuring temperature in CVD reactors. The two-colored pyrometers display the temperature even with unfavorable visibility, such as when the reactor viewing window is contaminated. Because of their high optical resolution, quick reply time, and variable focus, the pyrometers can measure even the smallest measuring spots on polycrystalline silicon bars, says Raytek.
The Modline 5, Modline 5R, Marathon MR, and Marathon MM are suitable for use in manufacturing of monocrystalline silicon wafers because of their short wavelengths. The high optical resolution makes possible contactless temperature measurements of the smallest measuring spots on the silicon's liquid-solid boundary surface, which is especially important for monitoring the crystal-pulling process, according to the company.
During coating processes, the GS150 monitoring system can display temperature distribution using thermal pictures and temperature profiles. If the system recognizes a thermal deviation, it sets off an alarm so the process can be corrected as soon as possible.
This content is protected by copyright and may not be reused. If you want to cooperate with us and would like to reuse some of our content, please contact: editors@pv-magazine.com.
By submitting this form you agree to pv magazine using your data for the purposes of publishing your comment.
Your personal data will only be disclosed or otherwise transmitted to third parties for the purposes of spam filtering or if this is necessary for technical maintenance of the website. Any other transfer to third parties will not take place unless this is justified on the basis of applicable data protection regulations or if pv magazine is legally obliged to do so.
You may revoke this consent at any time with effect for the future, in which case your personal data will be deleted immediately. Otherwise, your data will be deleted if pv magazine has processed your request or the purpose of data storage is fulfilled.
Further information on data privacy can be found in our Data Protection Policy.